6” Wafer Cassette

The Palbam ClassTM, innovative Stainless Steel wafer cassette is designed to replace standard plastic cassettes, in the semiconductor manufacturing process. The cassette has been designed to SEMI standard. 6 inch wafer bake cassettes with H Bar & either 25 or 12 slots.

Properties:

• non contaminating
• non deforming
• fully conductive
• withstand temperatures up to 400˚C
• with “H” – bar design
• dimension are highly accurate
• weights 800 grams
• design for robotic and manual handling
• fits into standard boxes
• Fabrication 316 Stainless Steel
• Handle optional

PCPC0154 – 25 slots

L x H x W (mm) 178 x 144 x 1171

PCPC0155 – 12 slots