Products Features
Pairs seamlessly with multiple process tools.
- Configurable for two, three or four cassette positions.
- Suitable for all open cassette presentation formats.
- Accomodates film frames, 300mm open cassettes, and special thin and warped wafer components.
- Features 4-axis robots.
- Full safety guarding (OSHA and ANSI compliant).
- Suitable for 50mm to 200mm wafers, or 300mm from shipping cassette.
Technical Documents
